Method for collecting remote maintenance and diagnostic data from subject equipment, other device and manufacturing execution system

ABSTRACT

Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention generally relates to a maintenance anddiagnostic data collecting method and system, and more particularly, toa method and a system for collecting data used for a remotemaintenance/diagnosis of a manufacturing equipment.

[0003] 2. Description of the Related Art

[0004] Recently, for example, when a vender of a manufacturingequipment, such as a semiconductor manufacturing equipment or a liquidcrystal manufacturing equipment, performs a remote maintenance/diagnosisof a manufacturing equipment of the vender which is operating at acustomer's site, the vender collects data regarding the manufacturingequipment subjected to the maintenance/diagnosis (hereinafter simplyreferred to as subject equipment) from the subject equipment per se orfrom an intermediary device, such as a group controller, which keepsdata sent from the subject equipment, to a remote maintenance center atthe vender's site. The customer's site and the vender's site areconnected via a communication network, such as a public circuit, aprivate circuit, or the Internet.

[0005] The remote maintenance center at the vender's site uses the datacollected regarding the manufacturing equipment operating at thecustomer's site for the maintenance of the manufacturing equipment orfor the diagnosis of the manufacturing equipment. Accordingly, when anabnormality occurs during a process of the subject equipment due to amalfunction of the subject equipment per se, a cause of the abnormalitycan be identified.

[0006] However, in reality, the cause of the abnormality occurringduring the process of the subject equipment is not limited to themalfunction of the subject equipment per se. For example, a malfunctionof a device other than the subject equipment in a preceding process ormalfunctions of other devices, such as a measurement equipment and atesting equipment, may result in the abnormality occurring during theprocess of the subject equipment. In addition, an event occurring whenthe subject equipment is off-line may result in the abnormalityoccurring during the process of the subject equipment after the subjectequipment is switched to online. In these cases, analyzing the dataregarding the subject equipment collected at the remote maintenancecenter at the vender's site does not lead to the identification of thecause of the abnormality of the subject equipment.

[0007] In order to perform the remote maintenance/diagnosis of thesubject equipment at the remote maintenance center even in theabove-described cases, it is effective to use data deriving from adevice other than the subject equipment, such as process result dataresulting from a process of a testing equipment, and to use dataregarding a manufacturing execution, such as work-in-process trackinginformation, for example.

SUMMARY OF THE INVENTION

[0008] It is a general object of the present invention to provide animproved and useful maintenance and diagnostic data collecting methodand system in which the above-mentioned problems are eliminated.

[0009] A more specific object of the present invention is to provide amethod and a system for collecting not only data deriving from amanufacturing equipment, but also data deriving from a device other thanthe manufacturing equipment and data regarding a manufacturing executionso as to use the data upon performing a remote maintenance/diagnosis ofthe manufacturing equipment.

[0010] In order to achieve the above-mentioned objects, there isprovided according to one aspect of the present invention a method forcollecting data used for a remote maintenance and diagnosis of amanufacturing equipment, the method including the step of collectingdata deriving from the manufacturing equipment being a subject of theremote maintenance and diagnosis, data deriving from a manufacturerelated equipment other than the manufacturing equipment, and dataregarding a manufacturing execution, and the step of transmitting thedata collected in the step of collecting to a remote center performingthe maintenance and diagnosis of the manufacturing equipment.

[0011] According to the present invention, upon subjecting amanufacturing equipment, such as a semiconductor manufacturing equipmentor a liquid crystal manufacturing equipment, to a remotemaintenance/diagnosis, data deriving from the subject equipment, dataderiving from a device other than the subject equipment, and dataregarding a manufacturing execution are collected as data necessary-forthe maintenance/diagnosis of the manufacturing equipment, and aretransmitted to a remote maintenance center performing themaintenance/diagnosis. Accordingly, upon performing themaintenance/diagnosis of the manufacturing equipment, the remotemaintenance center is able to use data deriving from a device other thanthe subject equipment, such as process result data resulting from aprocess of a testing equipment, and data regarding a manufacturingexecution, such as work-in-process tracking information.

[0012] Additionally, in the maintenance and diagnostic data collectingmethod according to the present invention, the data regarding themanufacturing execution may be data acquired from a manufacturingexecution system performing a manufacturing execution in a manufacturingfactory at a user's site. Thus, the data is used already for otherusage. Therefore, the data regarding the manufacturing execution can beacquired without involving extra costs.

[0013] Additionally, in the maintenance and diagnostic data collectingmethod according to the present invention, the data deriving from themanufacturing equipment, the data deriving from the manufacture relatedequipment, and the data regarding the manufacturing execution may becollected and transmitted to the remote center in response to a requestfrom the remote center. Thus, only data being necessary is communicatedonly when the data is necessary; accordingly, increase in communicationload can be kept to a minimum.

[0014] Additionally, in the maintenance and diagnostic data collectingmethod according to the present invention, the data deriving from themanufacturing equipment may be collected by a data controlling deviceconnected communicably to the manufacturing equipment and the remotecenter, and be transmitted to the remote center via the data controllingdevice. Accordingly, communications with the remote center situatedoutside the manufacturing factory can be concentrated on the datacontrolling device. Thus, each manufacturing equipment communicates withthe data controlling device on an existing LAN inside the manufacturingfactory without directly communicating with the remote center.Therefore, data used for the maintenance/diagnosis of the manufacturingequipment can be eventually collected to the user site without providinga new infrastructure.

[0015] Additionally, in the maintenance and diagnostic data collectingmethod according to the present invention, the data to be transmitted tothe remote center may be collected by a data controlling deviceconnected communicably to the remote center, upon receiving a requestfrom the remote center, and be transmitted to the remote center from thedata controlling device. Accordingly, all the data used for themaintenance/diagnosis of the manufacturing equipment can be collected tothe data controlling device, and be transmitted to the remote centerfrom the data controlling device. Thereby, an effective data collectionand transmission can be realized.

[0016] In order to achieve the above-mentioned objects, there isprovided according to one aspect of the present invention a system forcollecting data used for a remote maintenance and diagnosis of amanufacturing equipment, the system including the manufacturingequipment situated at a user site, manufacture related equipmentssituated at the user site, a manufacturing execution system situated atthe user site, a data collecting and transmitting part situated at theuser site, and a remote center remotely maintaining and diagnosing themanufacturing equipment, wherein the remote center is connectedcommunicably to the user site so as to make a request to the user sitefor data necessary for maintaining and diagnosing the manufacturingequipment, and to receive the necessary data collected at the user sitefrom the user site, and the data collecting and transmitting partcollects data deriving from the manufacturing equipment, data derivingfrom the manufacture related equipments, and manufacturing executiondata acquired from the manufacturing execution system, and transmits thedata deriving from the manufacturing equipment, the data deriving fromthe manufacture related equipments, and the manufacturing execution datato the remote center as the necessary data in response to the requestfrom the remote center.

[0017] According to the present invention, not only the data derivingfrom the manufacturing equipment, but also the data deriving from themanufacture related equipments other than the manufacturing equipmentand the manufacturing execution data, can be used as the data used forthe remote maintenance/diagnosis of the manufacturing equipment.Accordingly, even when a trouble occurring in the manufacturingequipment originates from measurement instruments or equipments in apreceding process, a malfunctioning part can be identified.Additionally, since the data deriving from the manufacture relatedequipments other than the manufacturing equipment and the manufacturingexecution data are data acquired and used already for other usages.Therefore, the data can be acquired without involving extra costs.

[0018] Additionally, in the maintenance and diagnostic data collectingsystem according to the present invention, the data collecting andtransmitting part may be incorporated in a group controllercorresponding to, or controlling, the manufacturing equipment.Accordingly, a data collection can be realized by using the existinggroup controller collectively controlling manufacturing equipments of asame type, without adding new hardware.

[0019] Other objects, features and advantages of the present inventionwill become more apparent from the following detailed description whenread in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG.1 is a diagram showing a configuration of a system forcollecting data used for performing a remote maintenance/diagnosis of asemiconductor manufacturing equipment according to one embodiment of thepresent invention; and

[0021] FIG.2 is a flowchart of a method performed by a maintenanceserver function according to the embodiment of the present invention forcollecting the data used for the remote maintenance/diagnosis.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] A description will now be given of an embodiment of the presentinvention.

[0023] FIG.1 is a diagram showing a configuration of a system forcollecting data used for performing a remote maintenance/diagnosis of asemiconductor manufacturing equipment according to one embodiment of thepresent invention.

[0024] In the system according to the present embodiment, asemiconductor manufacturing equipment 1 as a subject of amaintenance/diagnosis which is situated at a user's site (e.g., asemiconductor manufacturing factory) is maintained and diagnosedremotely by a remote center 3 at a vender's site. The semiconductormanufacturing equipment 1 is a device used in semiconductormanufacturing processes, such as a film deposition process, a diffusionprocess and an etching process. Besides, in a case shown in FIG.1, thevender's site and the user's site are connected via a communicationnetwork 5, such as the Internet. However, a communication between thevender's site and the user's site is conducted not only by using such anetwork, but also by using other communication systems including aconnection system using a public circuit or a connection system using aprivate circuit, which is capable of transmitting and receiving databetween the vender's site and the user's site.

[0025] Various apparatuses are installed in the semiconductormanufacturing factory at the user's site: the apparatuses include amanufacturing execution system 15 performing a manufacturing executionin the manufacturing factory as a whole, group controllers (datacontrolling devices) 7 and 17 collectively controlling semiconductormanufacturing equipments of a same type or of a same vender, varioustesting equipments 11, and other semiconductor manufacturing equipments13 and 21. These apparatuses are communicably connected via a network,such as an in-factory LAN 9, or via a bus. Besides, various manufacturerelated equipments 19, such as testing equipments and othersemiconductor manufacturing equipments, are connected to the groupcontroller 17. To simplify the case, FIG. 1 only shows the two groupcontrollers 7 and 17, the one semiconductor manufacturing equipment 1 asthe subject of the maintenance/diagnosis, the two other semiconductormanufacturing equipments 13 and 21, one of the manufacture relatedequipments 19, and one of the testing equipments 11. However, thepresent invention is applicable to a case including a larger number ofthese apparatuses.

[0026] The remote center 3 at the vender's site maintains and diagnosesthe semiconductor manufacturing equipment 1 situated at the user's site,regularly or when necessary. The remote center 3 sends a request via thecommunication network 5 to the group controller 7 controlling thesemiconductor manufacturing equipment 1 to transmit data used for themaintenance/diagnosis of the semiconductor manufacturing equipment 1.

[0027] Normally, the group controller 7 acquires and stores dataderiving from the semiconductor manufacturing equipment 1; accordingly,upon receiving the request from the remote center 3, the groupcontroller 7 may already have retained the data regarding thesemiconductor manufacturing equipment 1. If the data regarding thesemiconductor manufacturing equipment 1 is insufficient, the groupcontroller 7 newly acquires data deriving from the semiconductormanufacturing equipment 1.

[0028] Next, since the group controller 7 controls only data of the sametype, the data acquired from the semiconductor manufacturing equipment 1by the group controller 7 may not be sufficient for the remote center 3to maintain and diagnose the semiconductor manufacturing equipment 1 insome cases.

[0029] Such cases include a process trouble that results not only fromthe semiconductor manufacturing equipment 1 per se being troubled, butalso from testing equipments (including measurement instruments) ordevices in a preceding process. Therefore, in order to identify amalfunctioning part, it is preferable to use diagnostic information andprocess data deriving from other devices.

[0030] In general, diagnostic information and process data from numerousdevices, data from measurement instruments, and so forth are collectedin the manufacturing execution system 15. Accordingly, the groupcontroller 7 collects from the manufacturing execution system 15diagnostic information and process data deriving from other deviceswhich are necessary for the maintenance/diagnosis of the semiconductormanufacturing equipment 1. Besides, the group controller 7 may collectdiagnostic information and process data deriving from other devices byaccessing the group controller 17, the testing equipments 11 or thesemiconductor manufacturing equipment 13.

[0031] Further, aside from process result data deriving from theabove-mentioned measurement instruments and other devices, the groupcontroller 7 collects from the manufacturing execution system 15varieties of data regarding the manufacturing execution, such aswork-in-process (WIP) tracking information, process history, and currentstatus of each process step (online/offline), as data effective for themaintenance/diagnosis of the semiconductor manufacturing equipment 1.

[0032] Next, the group controller 7 transmits the data used for themaintenance/diagnosis of the semiconductor manufacturing equipment 1collected as above to the remote center 3 via the communication network5.

[0033] The remote center 3 performs the maintenance/diagnosis of thesemiconductor manufacturing equipment 1 by analyzing automatically,semiautomatically or manually the data used for themaintenance/diagnosis of the semiconductor manufacturing equipment 1transmitted from the group controller 7.

[0034] As described above, the group controller 7 according to thepresent embodiment has a function of a maintenance server (a datacollecting and transmitting part) collecting data used for amaintenance/diagnosis of a semiconductor manufacturing equipment, andtransmitting the collected data to a remote server. Alternatively, sucha maintenance server having the above-mentioned function may be providedseparately from the group controller 7.

[0035] FIG.2 is a flowchart of a method performed by the maintenanceserver or the maintenance server function of the group controlleraccording to the embodiment of the present invention for collectingmaintenance/diagnostic data used for a remote maintenance/diagnosis.

[0036] Step S1: The maintenance server receives a request formaintenance/diagnostic data from the remote center.

[0037] Step S2: The maintenance server collects data necessary for themaintenance/diagnosis from a semiconductor manufacturing equipment as asubject of the maintenance/diagnosis.

[0038] Step S3: The maintenance server collects data regarding otherdevices and data regarding a manufacturing execution which are relatedto the maintenance/diagnosis of the semiconductor manufacturingequipment from the manufacturing execution system.

[0039] Step S4: The maintenance server transmits the data collected instep S2 and step S3 to the remote center.

[0040] By the above-described steps, the remote center at a vender'ssite collects the data necessary for the maintenance/diagnosis of thesemiconductor manufacturing equipment from a user's site.

[0041] Next, a description will be given of examples of applying thepresent invention to cases of identifying a cause of an abnormalityoccurring in a semiconductor manufacturing process.

[0042] (1) A case of identifying a cause of an abnormality by judgingfrom an elapsed time from a preceding step:

[0043] Assuming that the process includes three steps of (a) preliminarywashing, (b) diffusion (film deposition) and (c) film thickness testing(measurement): when an elapsed time from the end of (a) preliminarywashing to the start of (b) diffusion is excessively long, a naturaloxide film forms on a wafer, which may result in an abnormality found inthe step of (c) film thickness testing. When the abnormality in filmthickness is detected in the step of (c) film thickness testing, adiffusion device is suspected to be in abnormal condition; thus, adiagnosis of the diffusion device is started.

[0044] However, in this case, a cause of the occurrence of theabnormality cannot be identified only from conventional process historyoutput from the diffusion device. By contrast, according to the presentinvention, process history (start/end time) of the preliminary washingis communicated to the manufacturing execution system; accordingly, theprocess history of the preliminary washing and the process history fromthe diffusion device are transmitted to the remote center, and areexamined in combination at the remote center; thereby the cause of theabnormality can be identified.

[0045] (2) A case of identifying an abnormality resulting from anoperation upon off-line status of a device:

[0046] When a semiconductor manufacturing equipment is off-line (ordown), no data is communicated from the semiconductor manufacturingequipment to the group controller. Therefore, as to a processabnormality and so forth originating from an operation (e.g., cleaning,parts replacement, or other maintenance processes) performed to thesemiconductor manufacturing equipment in an off-line status, it isdifficult to identify a cause of the abnormality only from datacommunicated from the semiconductor manufacturing equipment in an onlinestatus to the group controller.

[0047] According to the present invention, operations, such asmaintenance processes, performed according to an operator input and soforth to the semiconductor manufacturing equipment in the off-linestatus, is recorded in the manufacturing execution system as maintenancehistory. Accordingly, the maintenance history stored in themanufacturing execution system and the process history of thesemiconductor manufacturing equipment communicated via the groupcontroller are examined in combination at the remote center; thereby thecause of the abnormality can be identified.

[0048] The above-described maintenance and diagnostic data collectingmethod according to the embodiment of the present invention can beconstructed as software (program code); and executing this program codeby a CPU of a computer realizes the maintenance and diagnostic datacollecting system according to the embodiment of the present invention.The constructed program code is recorded in a disk device and so forth,and is installed into the computer as occasion arises; the constructedprogram code is stored in a portable recording medium, such as aflexible disk, a memory card, or a CD-ROM, and is installed into thecomputer as occasion arises; or the constructed program code isinstalled into the computer via a communication line; then, theconstructed program code is executed by the CPU of the computer.

[0049] The present invention is not limited to the specificallydisclosed embodiments, and variations and modifications may be madewithout departing from the scope of the present invention.

[0050] The present application is based on Japanese priority applicationNo. 2002-067093 filed on Mar. 12, 2002, the entire contents of which arehereby incorporated by reference.

What is claimed is:
 1. A method for collecting data used for a remotemaintenance and diagnosis of a manufacturing equipment, the methodcomprising the steps of: collecting data deriving from the manufacturingequipment being a subject of the remote maintenance and diagnosis, dataderiving from a manufacture related equipment other than saidmanufacturing equipment, and data regarding a manufacturing execution;and transmitting the data collected in the step of collecting to aremote center performing the maintenance and diagnosis of saidmanufacturing equipment.
 2. The method as claimed in claim 1, whereinsaid data regarding said manufacturing execution is acquired from amanufacturing execution system.
 3. The method as claimed in claim 1,wherein said data deriving from said manufacturing equipment, said dataderiving from said manufacture related equipment, and said dataregarding said manufacturing execution are collected and transmitted tosaid remote center in response to a request from said remote center. 4.The method as claimed in claim 1, wherein said data deriving from saidmanufacturing equipment is collected by a data controlling deviceconnected communicably to said manufacturing equipment and said remotecenter, and is transmitted to said remote center via said datacontrolling device.
 5. The method as claimed in claim 1, wherein thedata to be transmitted to said remote center is collected by a datacontrolling device in response to a request from said remote center, andis transmitted to said remote center from said data controlling device,the data controlling device being connected communicably to said remotecenter and receiving said request from said remote center.
 6. A systemfor collecting data used for a remote maintenance and diagnosis of amanufacturing equipment, the system comprising: the manufacturingequipment situated at a user site; manufacture related equipmentssituated at said user site; a manufacturing execution system situated atsaid user site; a data collecting and transmitting part situated at saiduser site; and a remote center remotely maintaining and diagnosing saidmanufacturing equipment, wherein said remote center is connectedcommunicably to said user site so as to make a request to said user sitefor data necessary for maintaining and diagnosing said manufacturingequipment, and to receive the necessary data collected at said user sitefrom said user site, and said data collecting and transmitting partcollects data deriving from said manufacturing equipment, data derivingfrom said manufacture related equipments, and manufacturing executiondata acquired from said manufacturing execution system, and transmitssaid data deriving from said manufacturing equipment, said data derivingfrom said manufacture related equipments, and said manufacturingexecution data to said remote center as said necessary data in responseto said request from said remote center.
 7. The system as claimed inclaim 6, wherein said data collecting and transmitting part isincorporated in a group controller controlling said manufacturingequipment.
 8. The system as claimed in claim 6, wherein said manufacturerelated equipments include at least one of a manufacturing equipmentother than said manufacturing equipment to be maintained and diagnosed,and a testing equipment.
 9. A system for collecting data used for aremote maintenance and diagnosis of a manufacturing equipment, thesystem comprising: the manufacturing equipment situated at a user site;a data collecting and transmitting part situated at said user site; anda remote center remotely maintaining and diagnosing said manufacturingequipment, wherein said remote center is connected communicably to saiduser site so as to make a request to said user site for data necessaryfor maintaining and diagnosing said manufacturing equipment, and toreceive the necessary data collected at said user site from said usersite, and said data collecting and transmitting part collects dataderiving from said manufacturing equipment, data deriving from amanufacture related equipment other than said manufacturing equipment,and manufacturing execution data acquired from a manufacturing executionsystem, and transmits said data deriving from said manufacturingequipment, said data deriving from said manufacture related equipment,and said manufacturing execution data to said remote center as saidnecessary data in response to said request from said remote center. 10.The system as claimed in claim 9, wherein said data collecting andtransmitting part is incorporated in a group controller controlling saidmanufacturing equipment.
 11. A system for collecting data used for aremote maintenance and diagnosis of a manufacturing equipment, thesystem comprising: the manufacturing equipment situated at a user site,and remotely maintained and diagnosed by a remote center; a manufacturerelated equipment situated at said user site, the manufacture relatedequipment producing data usable for said remote center to maintain anddiagnose said manufacturing equipment; a manufacturing execution systemsituated at said user site, the manufacturing execution systemoutputting manufacturing execution data usable for said remote center tomaintain and diagnose said manufacturing equipment; and a datacollecting and transmitting part cooperating with said manufacturerelated equipment and said manufacturing execution system so as tocollect data deriving from said manufacturing equipment, said dataproduced by said manufacture related equipment, and said manufacturingexecution data output by said manufacturing execution system, and totransmit said data deriving from said manufacturing equipment, said dataproduced by said manufacture related equipment, and said manufacturingexecution data to said remote center as data necessary for maintainingand diagnosing said manufacturing equipment, in response to a requestfrom said remote center.
 12. A remote center remotely maintaining anddiagnosing a manufacturing equipment situated at a user site, whereinsaid remote center is connected communicably to said user site so as tomake a request to said user site for data necessary for maintaining anddiagnosing said manufacturing equipment, and to receive data derivingfrom said manufacturing equipment, data deriving from a manufacturerelated equipment other than said manufacturing equipment, and dataregarding a manufacturing execution from said user site.
 13. A datacontrolling device connected communicably to a manufacturing equipmentbeing a subject of a remote maintenance and diagnosis, and to a remotecenter maintaining and diagnosing said manufacturing equipment so as toacquire data produced by said manufacturing equipment, and to transmitmaintenance and diagnostic data used for the maintenance and diagnosisof said manufacturing equipment to said remote center, wherein said datacontrolling device acquires data produced by a manufacture relatedequipment related to said manufacturing equipment, and acquires dataregarding a manufacturing execution from a manufacturing executionsystem, in response to a request from said remote center, and said datacontrolling device collects said data produced by said manufacturingequipment, said data produced by said manufacture related equipment, andsaid data regarding said manufacturing execution as said maintenance anddiagnostic data to be transmitted to said remote center.
 14. Amanufacturing execution system used for a manufacturing execution in afactory at which a manufacturing equipment subjected to a remotemaintenance and diagnosis by a remote center is situated, wherein saidmanufacturing execution system transmits data regarding a manufacturingexecution, the data being included in data used for the maintenance anddiagnosis of said manufacturing equipment, to said remote center via adata controlling device connected communicably to said remote center andsaid manufacturing execution system, in response to a request from saidremote center.
 15. A manufacture related equipment cooperating with amanufacturing equipment subjected to a remote maintenance and diagnosisby a remote center, wherein said manufacture related equipment transmitsprocess result data of said manufacture related equipment to said remotecenter via a data controlling device connected communicably to saidremote center and said manufacture related equipment, in response to arequest from said remote center.
 16. A manufacturing equipment subjectedto a remote maintenance and diagnosis by a remote center, wherein saidmanufacturing equipment transmits data deriving from said manufacturingequipment to said remote center via a data controlling device connectedcommunicably to said remote center and said manufacturing equipment, inresponse to a request from said remote center, and data deriving from amanufacture related equipment other than said manufacturing equipmentand data regarding a manufacturing execution are used together with saiddata deriving from said manufacturing equipment by said remote centerfor the remote maintenance and diagnosis of said manufacturingequipment.